发明授权
US06698007B2 Method and apparatus for resolving coloring conflicts between phase shifters
有权
用于解决移相器之间着色冲突的方法和装置
- 专利标题: Method and apparatus for resolving coloring conflicts between phase shifters
- 专利标题(中): 用于解决移相器之间着色冲突的方法和装置
-
申请号: US09975414申请日: 2001-10-09
-
公开(公告)号: US06698007B2公开(公告)日: 2004-02-24
- 发明人: Shao-Po Wu , Seonghun Cho , Alexandre Arkhipov , Ilya Grishashvili
- 申请人: Shao-Po Wu , Seonghun Cho , Alexandre Arkhipov , Ilya Grishashvili
- 主分类号: G06F1750
- IPC分类号: G06F1750
摘要:
One embodiment of the invention provides a system that automatically resolves conflicts between phase shifters during creation of a phase shifting mask to be used in an optical lithography process for manufacturing an integrated circuit. Upon receiving a specification of a layout on the integrated circuit, the system identifies critical-dimension features within the layout. Next, the system places phase shifters comprised of phase shifting geometries on the phase shifting mask to precisely define the critical-dimension features. In doing so, the system identifies junctions within and/or between the critical-dimension features, and removes phase shifting geometries associated with the junctions to obviate coloring conflicts between phase shifters on the phase shifting mask. In one embodiment of the invention, the junctions include T-junctions and/or L-junctions.
公开/授权文献
信息查询