发明授权
US06698728B1 Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
有权
用于将前体输送到多个外延反应器位置的方法和装置
- 专利标题： Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
- 专利标题（中）： 用于将前体输送到多个外延反应器位置的方法和装置
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申请号： US10149092申请日： 2002-06-06
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公开(公告)号： US06698728B1公开(公告)日： 2004-03-02
- 发明人: Megan Ravetz , Graham Williams , Andrew Nelson , Roy Trevor Blunt , Howard Williams , Rajesh Odedra
- 申请人： Megan Ravetz , Graham Williams , Andrew Nelson , Roy Trevor Blunt , Howard Williams , Rajesh Odedra
- 优先权： GB9929279 19991211
- 主分类号： B01D4702
- IPC分类号： B01D4702
摘要：
A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler (1) to a plurality of reactor sites (12, 14, 16, 18, 20) wherein a carrier gas (2) is introduced into the container (1) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites (12, 14, 16, 18, 20). The gaseous mixture may be stored in a reservoir (9) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.