• 专利标题: Flash memory cell and method for fabricating the same
  • 申请号: US10302285
    申请日: 2002-11-22
  • 公开(公告)号: US06699754B2
    公开(公告)日: 2004-03-02
  • 发明人: Yung-Meng Huang
  • 申请人: Yung-Meng Huang
  • 优先权: TW91108472A 20020424
  • 主分类号: H01L218242
  • IPC分类号: H01L218242
Flash memory cell and method for fabricating the same
摘要:
A flash memory cell. The memory cell includes a substrate, a floating gate, a control gate, and a source/drain region. The floating gate, disposed over the substrate and insulated from the substrate, has a plurality of hut structures. The control gate is disposed over the floating gate and insulated from the floating gate. The source/drain region is formed in the substrate. This invention further includes a method of fabricating a flash memory cell. First, a polysilicon layer and a germanium layer are successively formed over a substrate and insulated from the substrate. Subsequently, the substrate is annealed to form a germanium layer having a plurality of hut structures on the polysilicon layer to serve as a floating gate with the polysilicon layer. Next, a control gate is formed over the floating gate and insulated from the floating gate. Finally, a source/drain region is formed in the substrate.
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