发明授权
- 专利标题: Condenser for photolithography system
- 专利标题(中): 光刻系统用冷凝器
-
申请号: US10163791申请日: 2002-06-05
-
公开(公告)号: US06700644B2公开(公告)日: 2004-03-02
- 发明人: William C. Sweatt
- 申请人: William C. Sweatt
- 主分类号: G03B2742
- IPC分类号: G03B2742
摘要:
A condenser for a photolithography system, in which a mask image from a mask is projected onto a wafer through a camera having an entrance pupil, includes a source of propagating radiation, a first mirror illuminated by the radiation, a mirror array illuminated by the radiation reflected from said first mirror, and a second mirror illuminated by the radiation reflected from the array. The mirror array includes a plurality of micromirrors. Each of the micromirrors is selectively actuatable independently of each other. The first mirror and the second mirror are disposed such that the source is imaged onto a plane of the mask and the mirror array is imaged into the entrance pupil of the camera.
公开/授权文献
- US20030227606A1 CONDENSER FOR PHOTOLITHOGRAPHY SYSTEM 公开/授权日:2003-12-11
信息查询