发明授权
US06700644B2 Condenser for photolithography system 有权
光刻系统用冷凝器

  • 专利标题: Condenser for photolithography system
  • 专利标题(中): 光刻系统用冷凝器
  • 申请号: US10163791
    申请日: 2002-06-05
  • 公开(公告)号: US06700644B2
    公开(公告)日: 2004-03-02
  • 发明人: William C. Sweatt
  • 申请人: William C. Sweatt
  • 主分类号: G03B2742
  • IPC分类号: G03B2742
Condenser for photolithography system
摘要:
A condenser for a photolithography system, in which a mask image from a mask is projected onto a wafer through a camera having an entrance pupil, includes a source of propagating radiation, a first mirror illuminated by the radiation, a mirror array illuminated by the radiation reflected from said first mirror, and a second mirror illuminated by the radiation reflected from the array. The mirror array includes a plurality of micromirrors. Each of the micromirrors is selectively actuatable independently of each other. The first mirror and the second mirror are disposed such that the source is imaged onto a plane of the mask and the mirror array is imaged into the entrance pupil of the camera.
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