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US06700952B2 Optical apparatus for diffracting radiation having wavelength ≦160 nm 失效
用于衍射具有波长<= 160nm的辐射的光学装置

  • Patent Title: Optical apparatus for diffracting radiation having wavelength ≦160 nm
  • Patent Title (中): 用于衍射具有波长<= 160nm的辐射的光学装置
  • Application No.: US09760091
    Application Date: 2001-01-11
  • Publication No.: US06700952B2
    Publication Date: 2004-03-02
  • Inventor: Udo Dinger , Martin Ross-Messemer
  • Applicant: Udo Dinger , Martin Ross-Messemer
  • Priority: DE10001291 20000114
  • Main IPC: G21K106
  • IPC: G21K106
Optical apparatus for diffracting radiation having wavelength ≦160 nm
Abstract:
There is provided an optical apparatus for radiation with a wavelength ≦160 nm. The apparatus comprises a mirror with a mirror surface, and a first device for generating elastic oscillations with different acoustic wavelengths on the mirror surface due to surface deformations. Radiation impinging on the mirror surface is diffracted in a predetermined range of angles (&agr;).
Abstract(Chinese):

提供了一种波长<= 160nm的辐射光学装置。 该装置包括具有镜面的反射镜，以及用于由于表面变形而在镜面上产生具有不同声波长的弹性振荡的第一装置。 撞击在镜面上的辐射在预定的角度范围（α）被衍射。

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