发明授权
- 专利标题: DRAM cell having electrode with protection layer
- 专利标题(中): DRAM单元具有带保护层的电极
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申请号: US10189737申请日: 2002-07-08
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公开(公告)号: US06703657B2公开(公告)日: 2004-03-09
- 发明人: Yoo-Sang Hwang , Byung-Jun Park
- 申请人: Yoo-Sang Hwang , Byung-Jun Park
- 优先权: KR99-48926 19991105
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
A DRAM cell is provided, along with a method for fabricating such a DRAM cell. A protection layer pattern is formed to cover a common drain region of first and second access transistors. Storage node holes are then formed to expose each source region of the first and second access transistors, by using an etching insulator that has an etching selectivity with respect to the protection layer. Accordingly, even if there is a misalignment of the storage node holes to the source regions, the common drain region is not exposed by the misaligned storage node holes because of the presence of the protection layer pattern.