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US06703784B2 Electrode design for stable micro-scale plasma discharges 失效
电极设计用于稳定的微尺度等离子体放电

  • Patent Title: Electrode design for stable micro-scale plasma discharges
  • Patent Title (中): 电极设计用于稳定的微尺度等离子体放电
  • Application No.: US10174234
    Application Date: 2002-06-18
  • Publication No.: US06703784B2
    Publication Date: 2004-03-09
  • Inventor: Paul A. Vonallmen
  • Applicant: Paul A. Vonallmen
  • Main IPC: H01J724
  • IPC: H01J724
Electrode design for stable micro-scale plasma discharges
Abstract:
A microcavity plasma discharge device comprising a micro-cavity device structure which includes N dielectric material structures wherein N is a whole number greater than or equal to one, each N dielectric material structure including a dielectric spacer region with a first opening wherein the dielectric spacer region is sandwiched therebetween a first dielectric material region with a second opening and a second dielectric material region with a third opening wherein the second opening and the third opening are positioned adjacent to the first opening to form a trench with a width and wherein a first conductive material layer is sandwiched between the dielectric spacer region and the first dielectric material region and a second conductive material layer is sandwiched between the dielectric spacer region and the second dielectric material region.
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