发明授权
- 专利标题: Surface inspection tool
- 专利标题(中): 表面检测工具
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申请号: US08841214申请日: 1997-04-28
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公开(公告)号: US06704435B1公开(公告)日: 2004-03-09
- 发明人: Wayne Isami Imaino , Anthony Juliana , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , Steven Meeks , Richard Sonningfeld
- 申请人: Wayne Isami Imaino , Anthony Juliana , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , Steven Meeks , Richard Sonningfeld
- 主分类号: G06K900
- IPC分类号: G06K900
摘要:
A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. The reflected beam is routed to a detector which converts the intensity of the reflected into an analog signal. The analog signal is sampled and digitized to generate pixel data stored in a buffer. Various analyses are performed on the data including calculating a rate of change in the pixel data. If the rate of change in the pixel data exceeds a selected threshold that indicates a possible defect if it occurs in the data area of the disk.
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