发明授权
US06705928B1 Through-pad slurry delivery for chemical-mechanical polish 有权
用于化学机械抛光的通垫浆料输送

  • 专利标题: Through-pad slurry delivery for chemical-mechanical polish
  • 专利标题(中): 用于化学机械抛光的通垫浆料输送
  • 申请号: US10262285
    申请日: 2002-09-30
  • 公开(公告)号: US06705928B1
    公开(公告)日: 2004-03-16
  • 发明人: Chris E. Barns
  • 申请人: Chris E. Barns
  • 主分类号: B24B100
  • IPC分类号: B24B100
Through-pad slurry delivery for chemical-mechanical polish
摘要:
The present invention describes an apparatus that includes a polish pad, the polish pad including a first through-opening; a vertical distribution layer located below the polish pad, the vertical distribution layer connected to the through-opening; a lateral distribution layer located below the vertical distribution layer, the lateral distribution layer connected to the vertical distribution layer; and a slurry dispense located over a front-side of the polish pad, the slurry dispense to provide a slurry to be transported through the polish pad to the lateral distribution layer. The present invention further describes a method including dispensing a slurry at a front-side of a polish pad; flowing the slurry to a location below the polish pad; flowing the slurry upwards and outwards, towards edges of the polish pad; and distributing the slurry to an upper surface of the polish pad.
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