发明授权
- 专利标题: Cloth cleaning device and polishing machine
- 专利标题(中): 布清洁装置和抛光机
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申请号: US09716398申请日: 2000-11-20
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公开(公告)号: US06705929B1公开(公告)日: 2004-03-16
- 发明人: Yoshinobu Nishimoto , Makoto Nakajima , Yoshio Nakamura , Yasuhide Denda , Chihiro Miyagawa
- 申请人: Yoshinobu Nishimoto , Makoto Nakajima , Yoshio Nakamura , Yasuhide Denda , Chihiro Miyagawa
- 优先权: JP11-334631 19991125
- 主分类号: B24B700
- IPC分类号: B24B700
摘要:
Cloth cleaning device of a polishing machine which is capable of fully cleaning a polishing cloth including a part in the vicinity of a center roller. The cloth cleaning device includes an arm movable in a plane parallel to the polishing cloth between a first position above the polishing cloth and a second position outside of the polishing cloth. A jet nozzle is attached to the arm and directs high pressure water toward the polishing cloth. An enclosing member encloses the jet nozzle so as to prevent the high pressure water, which has been directed out from the jet nozzle, from scattering. The jet nozzle is oriented toward the center roller and the high pressure water is directed toward the part of the polishing cloth in the vicinity of the center roller when the arm moves the jet nozzle close to the center roller.