发明授权
- 专利标题: Method of manufacturing a transistor
- 专利标题(中): 制造晶体管的方法
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申请号: US10401672申请日: 2003-03-31
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公开(公告)号: US06706615B2公开(公告)日: 2004-03-16
- 发明人: Mizue Kitada , Toshiyuki Takemori , Shinji Kunori
- 申请人: Mizue Kitada , Toshiyuki Takemori , Shinji Kunori
- 优先权: JP2000-055387 20000301
- 主分类号: H01L2176
- IPC分类号: H01L2176
摘要:
A technique for reducing an on-resistance of a transistor is provided. A power MOSFET of the present invention has a semiconductor material which is disposed under a polysilicon gate and composed of polysilicon into which impurities are doped at low concentration. Therefore, a depletion layer is expanded to the inside of the semiconductor material under the polysilicon gate. Since the electric field strengths are uniform from the surface of a drain layer to a depth of the bottom surface of the semiconductor material and a high electric field is not generated at one site, the avalanche breakdown voltage of the transistor is increased. Therefore, the concentration of impurities in drain layer can be made higher than that in a conventional transistor and thereby the on-resistance of the transistor 1 can be reduced.
公开/授权文献
- US20030203576A1 Method of manufacturing a transistor 公开/授权日:2003-10-30
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