发明授权
US06707240B1 Electron gun and electron beam exposure device 失效
电子枪和电子束曝光装置

  • 专利标题: Electron gun and electron beam exposure device
  • 专利标题(中): 电子枪和电子束曝光装置
  • 申请号: US09890959
    申请日: 2001-09-28
  • 公开(公告)号: US06707240B1
    公开(公告)日: 2004-03-16
  • 发明人: Mamoru NakasujiKazuya Okamoto
  • 申请人: Mamoru NakasujiKazuya Okamoto
  • 优先权: JP11-30921 19990209
  • 主分类号: H01J115
  • IPC分类号: H01J115
Electron gun and electron beam exposure device
摘要:
An electron gun includes a plate-like main cathode 77 having an electron emitting surface 79 and a sub-cathode 81 provided toward the rear surface of the main cathode to heat the main cathode 77 by imparting an electron bombardment. The sub-cathode 81 is constituted of filaments 83 and 85 coiled in a double helix structure and the diameter of the sub-cathode 81 is larger than the diameter of the main cathode 77. As a result, the temperature at the peripheral area of the electron emitting surface 79 can be set higher than the temperature at the center, to achieve an electron beam with a uniform intensity distribution.
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