发明授权
- 专利标题： Diode, method for fabricating the diode, and coplanar waveguide
- 专利标题（中）： 二极管，制造二极管的方法和共面波导
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申请号： US10147806申请日： 2002-05-20
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公开(公告)号： US06710380B2公开(公告)日： 2004-03-23
- 发明人: Junko Iwanaga , Yorito Ota , Mitsuru Tanabe
- 申请人： Junko Iwanaga , Yorito Ota , Mitsuru Tanabe
- 优先权： JP11-289565 19991012
- 主分类号： H01L31109
- IPC分类号： H01L31109
摘要：
The diode of the present invention includes: a cathode electrode and an anode electrode that are disposed on a semiconductor substrate and are spaced apart from each other; and a shielding metal member placed between the cathode and anode electrodes.