- 专利标题: Electroless plating apparatus and method
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申请号: US09983399申请日: 2001-10-24
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公开(公告)号: US06716330B2公开(公告)日: 2004-04-06
- 发明人: Akihisa Hongo , Koji Mishima , Hiroaki Inoue , Norio Kimura , Tsutomu Karimata
- 申请人: Akihisa Hongo , Koji Mishima , Hiroaki Inoue , Norio Kimura , Tsutomu Karimata
- 优先权: JP2000-327800 20001026; JP2000-376189 20001211
- 主分类号: C25D2112
- IPC分类号: C25D2112
摘要:
An plating apparatus which can easily form a plated film having more uniform thickness on a surface, to be plate, of a material to be plated. The plating apparatus includes a holding portion having a heating portion for holding a material to be plated in such a state that a surface to be plated faces downward, and a plating bath for introducing an electroless plating liquid having a predetermined temperature into a plating chamber, and holding the electroless plating liquid while allowing the electroless plating liquid to overflow an overflow dam. The material which is by the holding portion, is brought into contact with the plating liquid in the plating bath to plate the material.
公开/授权文献
- US20020127790A1 Electroless plating apparatus and method 公开/授权日:2002-09-12
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