Invention Grant
US06720129B2 Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same
失效
含有氟的马来酰亚胺光致抗蚀剂聚合物和包含其的光致抗蚀剂组合物
- Patent Title: Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same
- Patent Title (中): 含有氟的马来酰亚胺光致抗蚀剂聚合物和包含其的光致抗蚀剂组合物
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Application No.: US10107659Application Date: 2002-03-27
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Publication No.: US06720129B2Publication Date: 2004-04-13
- Inventor: Geun Su Lee , Jae Chang Jung , Ki Soo Shin
- Applicant: Geun Su Lee , Jae Chang Jung , Ki Soo Shin
- Priority: KR2001-24266 20010504
- Main IPC: G03P7004
- IPC: G03P7004

Abstract:
Photoresist polymers, and photoresist compositions using the polymer are disclosed. More specifically, photoresist polymers containing maleimide represented by Formula 1. Photoresist compositions including the photoresist polymers have excellent etching resistance, heat resistance and adhesiveness, and development ability in aqueous tetramethylammonium hydroxide (TMAH) solution. As the compositions have low light absorbance at 193 nm and 157 nm wavelength, they are suitable for a process using ultraviolet light source such as VUV (157 nm). wherein, 1, R1, R2, R3, R, R′, R″, R″′, X, a and b are defined in the specification.
Public/Granted literature
- US20020164541A1 Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same Public/Granted day:2002-11-07
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