Invention Grant
US06720129B2 Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same 失效
含有氟的马来酰亚胺光致抗蚀剂聚合物和包含其的光致抗蚀剂组合物

  • Patent Title: Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same
  • Patent Title (中): 含有氟的马来酰亚胺光致抗蚀剂聚合物和包含其的光致抗蚀剂组合物
  • Application No.: US10107659
    Application Date: 2002-03-27
  • Publication No.: US06720129B2
    Publication Date: 2004-04-13
  • Inventor: Geun Su LeeJae Chang JungKi Soo Shin
  • Applicant: Geun Su LeeJae Chang JungKi Soo Shin
  • Priority: KR2001-24266 20010504
  • Main IPC: G03P7004
  • IPC: G03P7004
Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same
Abstract:
Photoresist polymers, and photoresist compositions using the polymer are disclosed. More specifically, photoresist polymers containing maleimide represented by Formula 1. Photoresist compositions including the photoresist polymers have excellent etching resistance, heat resistance and adhesiveness, and development ability in aqueous tetramethylammonium hydroxide (TMAH) solution. As the compositions have low light absorbance at 193 nm and 157 nm wavelength, they are suitable for a process using ultraviolet light source such as VUV (157 nm). wherein, 1, R1, R2, R3, R, R′, R″, R″′, X, a and b are defined in the specification.
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