发明授权
US06721082B1 Electrothermal diffraction grating 失效
电热衍射光栅

Electrothermal diffraction grating
摘要:
A modulator for modulating an incident beam of light, includes a structure defining a cavity and having a base and side walls surrounding the base; a first plurality of equally spaced apart thermally deformable reflective members having opposing end edges integrally formed in the side walls of the structure above the cavity.
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