发明授权
- 专利标题: Electromagnetic wave assisted chemical processing
- 专利标题(中): 电磁波辅助化学处理
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申请号: US09853448申请日: 2001-05-10
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公开(公告)号: US06723999B2公开(公告)日: 2004-04-20
- 发明人: Richard A. Holl
- 申请人: Richard A. Holl
- 主分类号: G01N2101
- IPC分类号: G01N2101
摘要:
A window allows the introduction of radiation energy into an annular processing chamber filled with a material to be processed. The chamber is formed from coaxial cylinder members rapidly rotating relative to one another. The chamber can be thin enough so that it is short compared to the penetration depth of the radiation through the material, providing even exposure of the material to the radiation. Also, eddies created in the material by the relative rotation enhances the even exposure. When the material inside the annular processing chamber is opaque, resulting in an insignificant penetration depth, the eddies still insure that the material is evenly exposed to the irradiation.
公开/授权文献
- US20010030295A1 Electromagnetic wave assisted chemical processing 公开/授权日:2001-10-18
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