发明授权
- 专利标题： Method of producing an ink jet recording head
- 专利标题（中）： 制造喷墨记录头的方法
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申请号： US09576174申请日： 2000-05-23
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公开(公告)号： US06729002B1公开(公告)日： 2004-05-04
- 发明人: Shinji Yasukawa , Minoru Usui , Takahiro Naka , Tsuyoshi Kitahara , Noriaki Okazawa , Hideaki Sonehara
- 申请人： Shinji Yasukawa , Minoru Usui , Takahiro Naka , Tsuyoshi Kitahara , Noriaki Okazawa , Hideaki Sonehara
- 优先权： JP7-251787 19950905; JP7-269191 19950922; JP7-260587 19951006; JP7-306622 19951031; JP8-170605 19960610
- 主分类号： H04R1700
- IPC分类号： H04R1700
摘要：
A pressurizing chamber 1 is formed as a recess by half etching of a silicon single-crystal substrate 2. A nozzle communicating hole 6 through which the pressurizing chamber 1 is connected to a nozzle opening 5 is formed as a through hole which is smaller in width than the pressurizing chamber 1. The pressurizing chamber 1 is connected to the nozzle opening 5 in the other face via the nozzle communicating hole 6 while reducing the volume of the pressurizing chamber 1 to a degree as small as possible. The silicon single-crystal substrate is used as a member constituting a spacer so that an ink drop of a reduced ink amount suitable for high density printing flies with high positioning accuracy.