Invention Grant
- Patent Title: Chemical mechanical polishing apparatus with rotating belt
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Application No.: US10174476Application Date: 2002-06-17
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Publication No.: US06729944B2Publication Date: 2004-05-04
- Inventor: Manoocher Birang , Lawrence M Rosenberg , Sasson R Somekh , John M White
- Applicant: Manoocher Birang , Lawrence M Rosenberg , Sasson R Somekh , John M White
- Main IPC: B24B2100
- IPC: B24B2100

Abstract:
A chemical mechanical polishing apparatus has a rotatable platen, a polishing sheet that is wider than the substrate extending between two reels, a drive mechanism to advance the polishing sheet, and a chucking mechanism to intermittently secure the polishing sheet to the platen. The platen can have a platen base that is adaptable to receive either a circular platen top or a rectangular platen top.
Public/Granted literature
- US20030060143A1 Chemical mechanical polishing apparatus with rotating belt Public/Granted day:2003-03-27
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