发明授权
- 专利标题： Surface control alloy substrates and methods of manufacture therefor
- 专利标题（中）： 表面处理合金基材及其制造方法
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申请号： US09616570申请日： 2000-07-14
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公开(公告)号： US06730410B1公开(公告)日： 2004-05-04
- 发明人: Leslie G. Fritzemeier , Qi Li , Martin W. Rupich , Elliott D. Thompson , Edward J. Siegal , Cornelis Leo Hans Thieme , Suresh Annavarapu , Paul N. Arendt , Stephen R. Foltyn
- 申请人： Leslie G. Fritzemeier , Qi Li , Martin W. Rupich , Elliott D. Thompson , Edward J. Siegal , Cornelis Leo Hans Thieme , Suresh Annavarapu , Paul N. Arendt , Stephen R. Foltyn
- 主分类号： B23B1500
- IPC分类号： B23B1500
摘要：
Methods and articles for controlling the surface of an alloy substrate for deposition of an epitaxial layer. The invention includes the use of an intermediate layer to stabilize the substrate surface against oxidation for subsequent deposition of an epitaxial layer.
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