发明授权
- 专利标题： Manufacturing system in electronic devices
- 专利标题（中）： 电子设备制造系统
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申请号： US10092486申请日： 2002-03-08
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公开(公告)号： US06730447B2公开(公告)日： 2004-05-04
- 发明人: Shinichi Ito , Tatsuhiko Higashiki , Hiroshi Ikegami , Nobuo Hayasaka
- 申请人： Shinichi Ito , Tatsuhiko Higashiki , Hiroshi Ikegami , Nobuo Hayasaka
- 优先权： JP2001-067304 20010309; JP2001-067305 20010309
- 主分类号： G03C500
- IPC分类号： G03C500
摘要：
A laser processing apparatus comprises a laser oscillator for producing a laser beam to selectively remove part of a substrate to be processed, a scanning system for applying the laser beam to an arbitrary position of the substrate and incident means for applying the laser beam to the substrate substantially at right angle.
公开/授权文献
- US20020136971A1 Manufacturing system in electronic devices 公开/授权日：2002-09-26