发明授权
US06730983B2 Semiconductor device with spiral inductor and method for fabricating semiconductor integrated circuit device
失效
具有螺旋电感的半导体器件及半导体集成电路器件的制造方法
- 专利标题： Semiconductor device with spiral inductor and method for fabricating semiconductor integrated circuit device
- 专利标题（中）： 具有螺旋电感的半导体器件及半导体集成电路器件的制造方法
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申请号： US09960333申请日： 2001-09-24
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公开(公告)号： US06730983B2公开(公告)日： 2004-05-04
- 发明人: Yoshihiro Minami
- 申请人： Yoshihiro Minami
- 优先权： JP2000-295823 20000928
- 主分类号： H01L2900
- IPC分类号： H01L2900
摘要：
A spiral inductor comprising: a substrate; a protruding portion which is formed on the top face of the substrate and the top of which serves as a dummy element for controlling a chemical mechanical polishing process; and a conductive layer which is formed on the substrate so as to have a spiral shape and which serves as an induction element, wherein the protruding portion is formed in a region other than a region directly below the conductive layer.
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