A field emission array includes a dielectric structure with at least two dielectric layers between the cathode and anode grid thereof. The lower dielectric layer is planarized to minimize the occurrence of electrical shorts between the cathode and anode grid of the field emission array. Thus, the upper dielectric layer is substantially free of any electrically conductive defects or imperfections that extend through the lower dielectric layer. In addition, the field emission array includes an array of emitter tips, which are laterally surrounded and may be spaced apart from the dielectric structure. The field emission array may also include a grid over the dielectric structure and the emitter tips, with the emitter tips being exposed through grid openings or apertures.