发明授权
- 专利标题: Surface isolation device
- 专利标题(中): 表面隔离装置
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申请号: US10063878申请日: 2002-05-21
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公开(公告)号: US06733616B2公开(公告)日: 2004-05-11
- 发明人: Hung-Sheng Hu , Tsung-Ping Hsu , Wei-Lin Chen , Chung-Cheng Chou , In-Yao Lee
- 申请人: Hung-Sheng Hu , Tsung-Ping Hsu , Wei-Lin Chen , Chung-Cheng Chou , In-Yao Lee
- 优先权: TW90112706A 20010525
- 主分类号: H05H100
- IPC分类号: H05H100
摘要:
A surface isolation device for isolating a predetermined area of a second surface of a wafer from an etching solution while the etching solution etches a first surface of the wafer to form a plurality of manifolds in the wafer. The surface isolation device has a base for positioning the wafer, a fixture for fixing the wafer on the base, and an isolation ring positioned on the base for isolating the predetermined area from the etching solution. When the fixture fixes the wafer on the base, the wafer sticks to the isolation ring, forming a seal that isolates the predetermined area from the etching solution.
公开/授权文献
- US20020174951A1 Surface isolation device 公开/授权日:2002-11-28
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