发明授权
US06733821B1 Method for forming an optical component 失效
光学部件的形成方法

  • 专利标题: Method for forming an optical component
  • 专利标题(中): 光学部件的形成方法
  • 申请号: US09688541
    申请日: 2000-10-16
  • 公开(公告)号: US06733821B1
    公开(公告)日: 2004-05-11
  • 发明人: Kazuhito ShimodaJunichi Ohsako
  • 申请人: Kazuhito ShimodaJunichi Ohsako
  • 优先权: JPP11-294406 19991015
  • 主分类号: G02B110
  • IPC分类号: G02B110
Method for forming an optical component
摘要:
A method for forming an optical component includes (i) depositing optical layers on a base, and (ii) controlling a thickness of a tuning layer by (a) depositing the tuning layer on the optical layers, (b) measuring a first optical characteristic, (c) measuring a second optical characteristic after continued deposition of the tuning layer, (d) determining whether the second optical characteristic has decreased compared to the first optical characteristic, (e) when the second optical characteristic has not decreased, continuing deposition of the tuning layer and returning to steps (ii)(b)-(e), when the second optical characteristic has decreased, terminating the depositing and removing a portion of the tuning layer formed during a period of time defined from when an increase/decrease of the second optical characteristic is stopped to when the second optical characteristic is changed to be decreased, and (f) adding a layer of a lower refractive index on the tuning layer.
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