发明授权
- 专利标题: Protective device for a turbo molecular pump and method of protecting a turbo molecular pump
- 专利标题(中): 涡轮分子泵的保护装置和保护涡轮分子泵的方法
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申请号: US10108530申请日: 2002-03-27
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公开(公告)号: US06736593B2公开(公告)日: 2004-05-18
- 发明人: Hirotaka Namiki , Akira Yamauchi
- 申请人: Hirotaka Namiki , Akira Yamauchi
- 优先权: JP2001-093230 20010328
- 主分类号: F04D1904
- IPC分类号: F04D1904
摘要:
A protective device is provided for protecting a turbo molecular pump having a rotor mounted for undergoing rotation, an intake port for sucking gas by rotation of the rotor, and an exhaust port for exhausting the gas sucked from the intake port. The protective device has a detecting device for detecting the occurrence of an abnormal phenomenon in the turbo molecular pump. An abnormal phenomenon inference device infers a type of the abnormal phenomenon detected by the detecting device. A value obtaining device infers a magnitude of damage given to the turbo molecular pump by the abnormal phenomenon inferred by the abnormal phenomenon inference device and obtains a value weighted based on the inferred magnitude of the damage. A value accumulation device accumulates the value obtained by the value obtaining device. A sum obtaining device obtains a sum of the values accumulated in the value accumulation device. A protecting device protects the turbo molecular pump in a case where the sum obtained by the sum obtaining device exceeds a predetermined value.
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