发明授权
- 专利标题： Lithographic apparatus and device manufacturing method
- 专利标题（中）： 平版印刷设备和器件制造方法
-
申请号： US10235854申请日： 2002-09-06
-
公开(公告)号： US06741329B2公开(公告)日： 2004-05-25
- 发明人: Martinus Hendrikus Antonius Leenders , Johannes Hubertus Josephina Moors , Erik Roelof Loopstra , Noud Jan Gilissen , Markus Franciscus Antonius Eurlings
- 申请人： Martinus Hendrikus Antonius Leenders , Johannes Hubertus Josephina Moors , Erik Roelof Loopstra , Noud Jan Gilissen , Markus Franciscus Antonius Eurlings
- 优先权： EP01307613 20010907
- 主分类号： G03B2742
- IPC分类号： G03B2742
摘要：
An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity.
公开/授权文献
- US20030063266A1 Lithographic apparatus and device manufacturing method 公开/授权日：2003-04-03
信息查询
