发明授权
- 专利标题： Control of MEMS and light modulator arrays
- 专利标题（中）： MEMS和光调制器阵列的控制
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申请号： US10429144申请日： 2003-04-30
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公开(公告)号： US06741384B1公开(公告)日： 2004-05-25
- 发明人: Eric T. Martin , Arthur Piehl , James R. Przybyla , Adam L Ghozeil , Peter J. Fricke
- 申请人： Eric T. Martin , Arthur Piehl , James R. Przybyla , Adam L Ghozeil , Peter J. Fricke
- 主分类号： G02B2600
- IPC分类号： G02B2600
摘要：
An array of MEMS devices having column lines and row lines, such as a light modulator array, is controlled in response to an input signal by providing a number of discrete voltages, multiplexing from the discrete voltages a selected voltage to be applied to each MEMS device of the array, and enabling application of the selected discrete voltage to each MEMS device of the array.
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