Invention Grant
- Patent Title: Metal-on-metal capacitor with conductive plate for preventing parasitic capacitance and method of making the same
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Application No.: US10065663Application Date: 2002-11-07
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Publication No.: US06743671B2Publication Date: 2004-06-01
- Inventor: Man-Chun Hu , Wen-Chung Lin
- Applicant: Man-Chun Hu , Wen-Chung Lin
- Priority: TW091118043A 20020809
- Main IPC: H01L218242
- IPC: H01L218242

Abstract:
An integrated capacitor including a semiconductor substrate is disclosed. An outer vertical plate is laid over the semiconductor substrate. The outer vertical plate of a plurality of first conductive slabs connected vertically using multiple first via plugs. The outer vertical plate defines a grid area. An inner vertical plate is laid over the semiconductor substrate in parallel with the outer vertical plate and is encompassed by the grid area defined by the outer vertical plate. The inner vertical plate consists of a plurality of second conductive slabs connected vertically using multiple second via plugs. A horizontal conductive plate is laid under the outer vertical plate and inner vertical plate over the semiconductor substrate for shielding the outer vertical plate from producing a plate-to-substrate parasitic capacitance thereof. The inner vertical plate is electrically connected with the horizontal conductive plate using at least one third via plug.
Public/Granted literature
- US20040036143A1 Integrated capacitor and method of making same Public/Granted day:2004-02-26
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