发明授权
US06746308B1 Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same
失效
基于晶片状态特性的动态批量分配以及完成相同的系统
- 专利标题： Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same
- 专利标题（中）： 基于晶片状态特性的动态批量分配以及完成相同的系统
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申请号： US09903267申请日： 2001-07-11
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公开(公告)号： US06746308B1公开(公告)日： 2004-06-08
- 发明人: Christopher A. Bode , Alexander J. Pasadyn
- 申请人： Christopher A. Bode , Alexander J. Pasadyn
- 主分类号： B24B4900
- IPC分类号： B24B4900
摘要：
In one illustrative embodiment, the method comprises providing a plurality of wafer lots, each of the lots comprising a plurality of wafers, performing at least one process operation on at least some of the wafers in each of the plurality of lots, identifying processed wafers having similar characteristics, re-allocating the wafers to lots based upon the identified characteristics, and performing additional processing operations on the identified wafers having similar characteristics in the re-allocated lots. In one illustrative embodiment, the system comprises a first processing tool for performing processing operations on each of a plurality of wafers in each of a plurality of wafer lots, a controller for identifying processed wafers having similar characteristics and re-allocating the wafers to lots based upon the identified characteristics, and a second processing tool adapted to perform additional processing operations on the identified wafers having similar characteristics in the re-allocated lot.
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