发明授权
- 专利标题: Resist composition and patterning process
- 专利标题(中): 抗蚀剂组成和图案化工艺
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申请号: US09984726申请日: 2001-10-31
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公开(公告)号: US06746817B2公开(公告)日: 2004-06-08
- 发明人: Takanobu Takeda , Jun Hatakeyama , Osamu Watanabe , Hiroshi Kubota
- 申请人: Takanobu Takeda , Jun Hatakeyama , Osamu Watanabe , Hiroshi Kubota
- 优先权: JP2000-334340 20001101
- 主分类号: G03C173
- IPC分类号: G03C173
摘要:
A polymer comprises recurring units of formula (1) and recurring units having acid labile groups which units increase alkali solubility as a result of the acid labile groups being decomposed under the action of acid, and has a Mw of 1,000-500,000. R1 and R2 each are hydrogen, hydroxyl, hydroxyalkyl, alkyl, alkoxy or halogen, and n is 0, 1, 2, 3 or 4. The polymer is useful as a base resin to form a chemically amplified, positive resist composition which has advantages including a significantly enhanced contrast of alkali dissolution rate before and after exposure, high sensitivity, high resolution, and high etching resistance and is best suited as a micropatterning material for use in VLSI manufacture.
公开/授权文献
- US20020081521A1 Resist composition and patterning process 公开/授权日:2002-06-27
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