Invention Grant
US06746892B2 Low heat loss and small contact area composite electrode for a phase change media memory device
失效
用于相变介质存储器件的低热损失和小接触面复合电极
- Patent Title: Low heat loss and small contact area composite electrode for a phase change media memory device
- Patent Title (中): 用于相变介质存储器件的低热损失和小接触面复合电极
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Application No.: US10637941Application Date: 2003-08-08
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Publication No.: US06746892B2Publication Date: 2004-06-08
- Inventor: Heon Lee , Dennis M. Lazaroff
- Applicant: Heon Lee , Dennis M. Lazaroff
- Main IPC: H01L4500
- IPC: H01L4500

Abstract:
A low heat loss and small contact area electrode structure for a phase change media memory device is disclosed. The memory device includes a composite electrode that includes a dielectric mandrel that is connected with a substrate and having a tapered shape that terminates at a vertex. An electrically conductive material conformally covers the dielectric mandrel and terminates at a tip. A first dielectric layer covers all of the composite electrode except an exposed portion of the composite electrode that is adjacent to the tip. A phase change media is in contact with the exposed portion. The exposed portion is only a small percentage of an overall surface area of the composite electrode so that a contact footprint between the exposed portion and the phase change media is small relative to a surface area of the phase change media and Joule heat transfer from the phase change media into the composite electrode is reduced.
Public/Granted literature
- US20040077123A1 LOW HEAT LOSS AND SMALL CONTACT AREA COMPOSITE ELECTRODE FOR A PHASE CHANGE MEDIA MEMORY DEVICE Public/Granted day:2004-04-22
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