Invention Grant
US06746892B2 Low heat loss and small contact area composite electrode for a phase change media memory device 失效
用于相变介质存储器件的低热损失和小接触面复合电极

  • Patent Title: Low heat loss and small contact area composite electrode for a phase change media memory device
  • Patent Title (中): 用于相变介质存储器件的低热损失和小接触面复合电极
  • Application No.: US10637941
    Application Date: 2003-08-08
  • Publication No.: US06746892B2
    Publication Date: 2004-06-08
  • Inventor: Heon LeeDennis M. Lazaroff
  • Applicant: Heon LeeDennis M. Lazaroff
  • Main IPC: H01L4500
  • IPC: H01L4500
Low heat loss and small contact area composite electrode for a phase change media memory device
Abstract:
A low heat loss and small contact area electrode structure for a phase change media memory device is disclosed. The memory device includes a composite electrode that includes a dielectric mandrel that is connected with a substrate and having a tapered shape that terminates at a vertex. An electrically conductive material conformally covers the dielectric mandrel and terminates at a tip. A first dielectric layer covers all of the composite electrode except an exposed portion of the composite electrode that is adjacent to the tip. A phase change media is in contact with the exposed portion. The exposed portion is only a small percentage of an overall surface area of the composite electrode so that a contact footprint between the exposed portion and the phase change media is small relative to a surface area of the phase change media and Joule heat transfer from the phase change media into the composite electrode is reduced.
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