发明授权
US06747279B2 Objective lens for a charged particle beam device 有权
用于带电粒子束装置的物镜

  • 专利标题: Objective lens for a charged particle beam device
  • 专利标题(中): 用于带电粒子束装置的物镜
  • 申请号: US10182437
    申请日: 2002-10-03
  • 公开(公告)号: US06747279B2
    公开(公告)日: 2004-06-08
  • 发明人: Pavel Adamec
  • 申请人: Pavel Adamec
  • 优先权: EP00101708 20000127
  • 主分类号: H01J3710
  • IPC分类号: H01J3710
Objective lens for a charged particle beam device
摘要:
An improved objective lens for a charged particle beam device is constituted by, among other things, a magnetic lens that creates a first magnetic field for focussing the charged particle beam onto the specimen. Furthermore, a deflector is integrated into the magnetic lens by providing at least one additional coil arrangement that creates a second magnetic field used to deflect the charged particle beam. Thereby, the second magnetic field is guided through at least one of the pole pieces of the magnetic lens. The present invention also provides an improved column for a charged particle beam device including the improved objective lens.
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