Invention Grant
- Patent Title: Semiconductor inspecting system for inspecting a semiconductor integrated circuit device, and semiconductor inspecting method using the same
- Patent Title (中): 用于检查半导体集成电路器件的半导体检查系统以及使用其的半导体检查方法
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Application No.: US10119067Application Date: 2002-04-10
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Publication No.: US06750672B2Publication Date: 2004-06-15
- Inventor: Masaaki Tanimura , Mitsuhiro Hamada , Osamu Hashimoto
- Applicant: Masaaki Tanimura , Mitsuhiro Hamada , Osamu Hashimoto
- Priority: JP2001-219457 20010719
- Main IPC: G01R3102
- IPC: G01R3102

Abstract:
An apparatus to be inspected is mounted on one surface of a socket board. An auxiliary inspecting apparatus for adjusting timing of write signals transmitted from a semiconductor inspecting apparatus is mounted on the other surface of the socket board. Input/output (I/O) pins of the auxiliary inspecting apparatus are connected to corresponding I/O pins of the inspected device via through holes in the socket board on a one-to-one basis. This semiconductor inspecting method is thus capable of easily suppressing the delay difference between a plurality of signals output from the semiconductor inspecting apparatus.
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