Invention Grant
- Patent Title: Fan out of interconnect elements attached to semiconductor wafer
- Patent Title (中): 扇出连接到半导体晶圆的互连元件
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Application No.: US10001437Application Date: 2001-10-31
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Publication No.: US06759311B2Publication Date: 2004-07-06
- Inventor: Benjamin N. Eldridge , Igor Y. Khandros
- Applicant: Benjamin N. Eldridge , Igor Y. Khandros
- Main IPC: H01L21301
- IPC: H01L21301

Abstract:
An unsingulated semiconductor wafer is provided. Electrical interconnect elements are formed on the unsingulated wafer such that the interconnect elements are electrically connected to terminals of the semiconductor dice composing the wafer. At least a portion of the interconnect elements extend beyond the boundaries of the dice into the scribe streets separating the individual dice. Thereafter, the wafer is singulated into individual dice.
Public/Granted literature
- US20030082890A1 Fan out of interconnect elements attached to semiconductor wafer Public/Granted day:2003-05-01
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