发明授权
US06759702B2 Memory cell with vertical transistor and trench capacitor with reduced burried strap
有权
具有垂直晶体管和沟槽电容器的存储单元,具有减少的挂带
- 专利标题: Memory cell with vertical transistor and trench capacitor with reduced burried strap
- 专利标题(中): 具有垂直晶体管和沟槽电容器的存储单元,具有减少的挂带
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申请号: US10261559申请日: 2002-09-30
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公开(公告)号: US06759702B2公开(公告)日: 2004-07-06
- 发明人: Carl J. Radens , Ramachandra Divakaruni , Jack A. Mandelman
- 申请人: Carl J. Radens , Ramachandra Divakaruni , Jack A. Mandelman
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
A memory cell structure including a semiconductor substrate, a deep (e.g., longitudinal) trench in the semiconductor substrate, the deep trench having a plurality of sidewalls and a bottom, a buried strap along a sidewall of the deep trench, a storage capacitor at the bottom of the deep trench, a vertical transistor extending down the sidewall of the deep trench above the storage capacitor, the transistor having a diffusion extending in the plane of the substrate adjacent the deep trench, a collar oxide extending down another sidewall of the deep trench opposite the capacitor, shallow trench isolation regions extending along a surface of the substrate in a direction transverse to the sidewall where the vertical transistor extends, a gate conductor extending within the deep trench, a wordline extending over the deep trench and connected to the gate conductor, and a bitline extending above the surface plane of the substrate having a contact to the diffusion between the shallow trench isolation regions. The deep trench has a perimeter in a direction normal to its depth, and the buried strap extends a distance along the perimeter, the distance being only within a range of 5% to 20% of the entire linear distance along the perimeter, and being less than one lithographic feature size. Preferably, the strap in a direction along the perimeter is curved and is disposed along only one corner of the perimeter. The structure is particularly useful for a sub-8F2 cell.
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