发明授权
US06760143B2 Micromirror actuator 有权
微镜执行器

  • 专利标题: Micromirror actuator
  • 专利标题(中): 微镜执行器
  • 申请号: US10173029
    申请日: 2002-06-18
  • 公开(公告)号: US06760143B2
    公开(公告)日: 2004-07-06
  • 发明人: Yong-seop Yoon
  • 申请人: Yong-seop Yoon
  • 优先权: KR2001-36092 20010623
  • 主分类号: G02B2600
  • IPC分类号: G02B2600
Micromirror actuator
摘要:
A micromirror actuator includes: a substrate; spring units elastically supported by protrusion formed on the substrate; a micromirror connected to the spring units and formed to be capable of rotating; trenches formed in the substrate at either side of the protrusions to correspond to the surface of the micromirror; and lower electrodes formed in each of the trenches. Accordingly, it is possible to expand the range of the driving angle of the micromirror with the use of a lower voltage.
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