Invention Grant
- Patent Title: Articulated MEMS electrostatic rotary actuator
- Patent Title (中): 铰接式MEMS静电旋转执行机构
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Application No.: US10309800Application Date: 2002-12-04
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Publication No.: US06760144B2Publication Date: 2004-07-06
- Inventor: Edward Hill , Ramaswamy Mahadevan , Vijayakumar Rudrappa Dhuler , Robert Wood
- Applicant: Edward Hill , Ramaswamy Mahadevan , Vijayakumar Rudrappa Dhuler , Robert Wood
- Main IPC: G02B2600
- IPC: G02B2600

Abstract:
A micro-electro-mechanical device designed such that the actuating means are only mechanically coupled to the optical components. The device includes a substrate, a mirror supported above the substrate, and a rotatory actuator also supported above the substrate. The mirror and actuator are mechanically coupled via a torsional coupling hinge such that the mirror can be angled and/or tilted by electrostatically driving the rotatory actuator. Advantageously, the micro-mirrors and actuator are fabricated from the same layer during the micro-machining fabrication process. In one embodiment, the mirror is rotatable about a fixed rotation axis. In another embodiment, the mirror is freely rotatable.
Public/Granted literature
- US20040008400A1 Articulated MEMS electrostatic rotary actuator Public/Granted day:2004-01-15
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