发明授权
- 专利标题: Transferring apparatus and substrate processing apparatus
- 专利标题(中): 转印装置和基板处理装置
-
申请号: US09998431申请日: 2001-11-28
-
公开(公告)号: US06761178B2公开(公告)日: 2004-07-13
- 发明人: Osamu Kuroda , Takayuki Ogami
- 申请人: Osamu Kuroda , Takayuki Ogami
- 优先权: JP2000-362989 20001129
- 主分类号: B08B304
- IPC分类号: B08B304
摘要:
A cleaning apparatus 11 includes a cleaning bath 30 for cleaning wafers W, a wafer guide 31 moving up and down to accommodate the wafers W in the cleaning bath 30, a motor 49 for moving the wafer guide 31 up and down, an absolute encoder 33 for detecting the position of the wafer guide 31, a driver 62 and a controller 63. The absolute encoder 33 detects a rotational angle of a rotating shaft 53 of the motor 49 and outputs a detection signal to the driver 62. Based on this detection signal, the driver 62 detects the position of the wafer guide 31 and further outputs the positional information of the wafer guide 31 to the controller 63. Thus, the invention provides a transferring apparatus and a substrate processing apparatus both of which allow of easy detection of the wafer guide and further facilitate their maintenance.