发明授权
- 专利标题: Method of manufacturing monolithic ink-jet printhead
- 专利标题(中): 单片喷墨打印头的制造方法
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申请号: US10287488申请日: 2002-11-05
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公开(公告)号: US06762012B2公开(公告)日: 2004-07-13
- 发明人: Tae-kyun Kim , Seo-hyun Cho , Myung-song Jung , Kyong-il Kim , Sung-joon Park
- 申请人: Tae-kyun Kim , Seo-hyun Cho , Myung-song Jung , Kyong-il Kim , Sung-joon Park
- 优先权: KR2001-68631 20011105
- 主分类号: B41J216
- IPC分类号: B41J216
摘要:
A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.
公开/授权文献
- US20030087199A1 Method of manufacturing monolithic ink-jet printhead 公开/授权日:2003-05-08
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