发明授权
- 专利标题: Crystal growth apparatus
- 专利标题(中): 晶体生长装置
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申请号: US10149223申请日: 2002-10-15
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公开(公告)号: US06764547B2公开(公告)日: 2004-07-20
- 发明人: Takayuki Kubo , Fumio Kawahigashi , Hiroshi Asano , Naohiro Takaoka
- 申请人: Takayuki Kubo , Fumio Kawahigashi , Hiroshi Asano , Naohiro Takaoka
- 优先权: JP2000-309107 20001010
- 主分类号: C30B3500
- IPC分类号: C30B3500
摘要:
An apparatus for growing a crystal, using the cooler 10 surrounding the single crystal 8 for high speed pulling. The cooler 10 is prepared using a copper-based metal and is water cooled. The supporting arm 12 that supports the cooler 10 is prepared using stainless steel or the like, which is higher in mechanical strength than copper-based metals and is inferior in thermal conductivity, and is detachably connected to the cooler 10. Excessive cooling of the supporting arm 12 and disposition due to precipitation of silicon oxide are prevented, leading to improvement in disposition free pulling rate without the prevention of speed-up. The cost of manufacture of the cooler 10 is saved. The support strength of the cooler is improved.
公开/授权文献
- US20030051661A1 Crystal growth apparatus 公开/授权日:2003-03-20
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