发明授权
US06764875B2 Method of and apparatus for sealing an hermetic lid to a semiconductor die 有权
用于将密封盖密封到半导体管芯的方法和设备

  • 专利标题: Method of and apparatus for sealing an hermetic lid to a semiconductor die
  • 专利标题(中): 用于将密封盖密封到半导体管芯的方法和设备
  • 申请号: US09866266
    申请日: 2001-05-24
  • 公开(公告)号: US06764875B2
    公开(公告)日: 2004-07-20
  • 发明人: James Gill Shook
  • 申请人: James Gill Shook
  • 主分类号: H01L2144
  • IPC分类号: H01L2144
Method of and apparatus for sealing an hermetic lid to a semiconductor die
摘要:
A method and apparatus of hermetically passivating a semiconductor device includes sealing a lid directly onto a semiconductor substrate. An active device is formed on the surface of the substrate and is surrounded by a substantially planar lid sealing region, which in turn is surrounded by bonding pads. A first layer of solderable material is formed on the lid sealing region. A lid is provided which has a second layer of solderable material in a configuration corresponding to the first layer. A solder is provided between the first layer and second layer of solderable materials. In the preferred embodiment, the solder is formed over the second layer. Heat is provided to hermetically join the lid to the semiconductor device without requiring a conventional package. Preferably the first and second layers are sandwiches of conventionally known solderable materials which can be processed using conventional semiconductor techniques. An angle between the lid and the semiconductor device can be controlled by adjusting relative widths of one or both the layers of solderable materials.
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