发明授权
- 专利标题: Vapor jet pump with ejector stage in foreline
- 专利标题(中): 蒸汽喷射泵,带前排的喷射器
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申请号: US10290866申请日: 2002-11-07
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公开(公告)号: US06767192B2公开(公告)日: 2004-07-27
- 发明人: Marsbed Hablanian
- 申请人: Marsbed Hablanian
- 主分类号: F04B900
- IPC分类号: F04B900
摘要:
A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.