发明授权
- 专利标题: MEMS membrane with integral mirror/lens
- 专利标题(中): 集成镜/透镜的MEMS膜
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申请号: US09804618申请日: 2001-03-12
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公开(公告)号: US06768756B2公开(公告)日: 2004-07-27
- 发明人: Dale C. Flanders , Steven F. Nagle , Margaret B. Stern
- 申请人: Dale C. Flanders , Steven F. Nagle , Margaret B. Stern
- 主分类号: H01S313
- IPC分类号: H01S313
摘要:
An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
公开/授权文献
- US20020126726A1 MEMS membrane with integral mirror/lens 公开/授权日:2002-09-12
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