发明授权
US06768756B2 MEMS membrane with integral mirror/lens 有权
集成镜/透镜的MEMS膜

MEMS membrane with integral mirror/lens
摘要:
An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
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