A substrate for use of an ink jet recording head is provided with a plurality of heat generating members for generating thermal energy to be utilized for discharging ink. The heat generating members are structured by thin film formed by material represented by Tax Siy Rz, which has specific resistance value of 4000 &mgr;&OHgr;·cm or less, where R is one or more kinds of elements selected from among C, O, N, and x+y+z=100. With the structure thus arranged, the heat generating members make it possible to maintain the change of resistance values within a small amount even when used continuously for a long time, and provide recorded images in high quality with long life and reliability.