Invention Grant
- Patent Title: Barrier coatings produced by atmospheric glow discharge
- Patent Title (中): 大气辉光放电产生的阻挡涂层
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Application No.: US10228358Application Date: 2002-08-26
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Publication No.: US06774018B2Publication Date: 2004-08-10
- Inventor: Michael G. Mikhael , Angelo Yializis , Richard E. Ellwanger
- Applicant: Michael G. Mikhael , Angelo Yializis , Richard E. Ellwanger
- Main IPC: H01L2120
- IPC: H01L2120

Abstract:
A plasma is produced in a treatment space by diffusing a plasma gas at atmospheric pressure and subjecting it to an electric field created by two metallic electrodes separated by a dielectric material, a vapor precursor is mixed with the plasma, and a substrate material is coated by vapor deposition of the vaporized substance at atmospheric pressure in the plasma field. The use of vaporized silicon-based materials, fluorine-based materials, chlorine-based materials, and organo-metallic complex materials enables the manufacture of coated substrates with improved properties with regard to moisture-barrier, oxygen-barrier, hardness, scratch- and abrasion-resistance, chemical-resistance, low-friction, hydrophobic and/or oleophobic, hydrophilic, biocide and/or antibacterial, and electrostatic-dissipative/conductive characteristics.
Public/Granted literature
- US20020195950A1 Barrier coatings produced by atmospheric glow discharge Public/Granted day:2002-12-26
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