发明授权
- 专利标题: Valve/sensor assemblies
- 专利标题(中): 阀/传感器组件
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申请号: US10404797申请日: 2003-04-01
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公开(公告)号: US06776567B2公开(公告)日: 2004-08-17
- 发明人: Brian Johnson , Edward Ng , Justin Mauck , Edward R. Dykes , Joseph Arthur Kraus
- 申请人: Brian Johnson , Edward Ng , Justin Mauck , Edward R. Dykes , Joseph Arthur Kraus
- 主分类号: B65G4907
- IPC分类号: B65G4907
摘要:
In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber; and (3) a mounting mechanism adapted to couple the door assembly to the chamber. The valve/sensor assembly also includes a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through at least a portion of the door assembly. Systems, methods and computer program products are provided in accordance with this and other aspects.
公开/授权文献
- US20030167102A1 Valve/sensor assemblies 公开/授权日:2003-09-04
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