Invention Grant
- Patent Title: Device for specific particle manipulation and deposition
- Patent Title (中): 用于特定粒子操纵和沉积的装置
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Application No.: US10403202Application Date: 2003-03-31
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Publication No.: US06777880B2Publication Date: 2004-08-17
- Inventor: Gregor Morfill , Hubertus Thomas , Timo Stuffler , Uwe Konopka
- Applicant: Gregor Morfill , Hubertus Thomas , Timo Stuffler , Uwe Konopka
- Priority: DE19814871 19980402
- Main IPC: H01J724
- IPC: H01J724

Abstract:
A process for manipulating particles distributed substantially non-uniformly in a plasma of a carrier or reaction gas, wherein Coulomb interaction between the particles is so low that the particles substantially do not form a plasmacrystalline state, and the particles are exposed in a location-selective manner to external adjustment forces and/or the plasma conditions are subjected to a location-selective change to apply at least a portion of the particles onto a substrate surface mask-free and/or subject it to a location-selective plasma treatment in the carrier or reaction gas.
Public/Granted literature
- US20030185983A1 Device for specific particle manipulation and deposition Public/Granted day:2003-10-02
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