发明授权
- 专利标题: Method for manufacturing active matrix substrate
- 专利标题(中): 有源矩阵基板的制造方法
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申请号: US10188743申请日: 2002-07-05
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公开(公告)号: US06778232B2公开(公告)日: 2004-08-17
- 发明人: Shinichi Nakata , Yuji Yamamoto , Takayuki Ishino
- 申请人: Shinichi Nakata , Yuji Yamamoto , Takayuki Ishino
- 优先权: JP2001-214129 20010713
- 主分类号: G02F1136
- IPC分类号: G02F1136
摘要:
In a step for forming a contact through hole in a protective film that covers a Thin Film Transistor (TFT) to connect a source electrode of the TFT and a pixel electrode to each other, location of a later-formed contact through hole is designed to be apart not less than 2.0 &mgr;m from location of the opening of an overcoat layer, which opening is formed on the protective film. This construction forces the opening of a novolac type photosensitive resist to be positioned inside the location of the opening of the overcoat layer and therefore, the contact through hole formed in the protective film is able to have a tapered cross sectional profile that is never affected by the opening of the overcoat layer, allowing for stable connection between the source electrode and the pixel electrode.
公开/授权文献
- US20030013236A1 Method for manufacturing active matrix substrate 公开/授权日:2003-01-16
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