发明授权
- 专利标题: Automated material handling system and method of use
- 专利标题(中): 自动物料搬运系统及使用方法
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申请号: US10268379申请日: 2002-10-10
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公开(公告)号: US06778879B2公开(公告)日: 2004-08-17
- 发明人: Ko-Pin Chang , Ming Wang , Jui-An Shih , Jim Chue , Jason Liu
- 申请人: Ko-Pin Chang , Ming Wang , Jui-An Shih , Jim Chue , Jason Liu
- 主分类号: G06F700
- IPC分类号: G06F700
摘要:
The present invention provides an automated material handling system (AMHS) having: a FOUP management system, for managing a plurality of multiple lot FOUPs; a real time dispatch system for controlling dispatching of wafer lot orders within a wafer fabrication system; an automatic material handling integration system having a stocker for storing and sequencing a plurality of FOUPs, the stocker having an embedded sorter disposed there within for sorting wafers within a plurality of multiple lot FOUPs, and a FOUP transportation system for transporting FOUPs within a wafer fabrication facility; a manufacture execution system in operative communication with the real time dispatch system for controlling recipe processing and for controlling flow of FOUPs within the FAB; and a computer integrated manufacturing system for automating equipment within the AMHS. Additionally provided is a methodology for using the embedded sorter to sort FOUPs and a plurality of wafers within the AMHS.
公开/授权文献
- US20040073331A1 Automated material handling system and method of use 公开/授权日:2004-04-15
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